Fully modular system that can be configured to match your use case.

Single unit stores up to 3000 reticles in a small footprint.

Multiple units can be linked together to increase capacity.

Available without storage as a stand alone handling system.

Multiple load ports that can accommodate single and multi-reticle SMIF pods.

Also Toppan and Pozzetta shipping boxes.

Optional pod storage and OHT interface capable.

Automatic reticle orientation for Nikon or ASML use case.

Purge air options include Fan Filter Units or XCDA.

SECS/GEM compliant.

Designed to be able to ship mostly complete as one unit. This greatly simplifies the start up process.

The major systems are off the shelf name brand components. PLC based control system with a name brand multi-axis robot. No custom devices to fail or go obsolete. Easier to replace and service.